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High-frequency laser CVD device

Easily set up the sample! You can introduce the YAG laser from the external viewport to perform film deposition.

This product is a CVD device that allows film formation by introducing a YAG laser from an external viewport, with a sample stage (equipped with an automatic rotation mechanism) located at the center of a high-frequency heating coil. The sample inlet is located on the side of the chamber and can be opened and closed from both sides, making it easy to set the sample. It is also possible to install a gas supply system (up to 5 systems) at the top of the chamber as an option. 【Features】 ■ Film formation can be achieved by introducing a YAG laser from an external viewport ■ The sample inlet is located on the side of the chamber and can be opened and closed from both sides ■ Easy sample setup ■ Option to install a gas supply system (up to 5 systems) at the top *For more details, please refer to the external link page or feel free to contact us.

  • CVD Equipment
  • High frequency laser CVD equipment

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